Comparison ledger
KLA Candela CS 20 V and KLA P-20H, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Candela CS 20 | KLA P-20H |
| Specifications | ||
| Voltage | 230 VAC[1] | — |
| Configuration | 50/60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Chuck | 2-5"[2] | — |
| Wafer sizes | 4-inch and 6-inch[3] | — |
| Chuck sizes | 4-inch and 6-inch[3] | — |
| Software vs | Candela Wafer Version 6.8 Build 16[3] | — |
| Laser specs | 405 nm oblique-incidence laser and 660 nm normal-incidence laser[3] | — |
| Tool type | — | Stylus profilometer[4] |
| Stylus tip radius | — | 2 µm[4] |
| Stylus cone angle | — | 60°[4] |
| Vertical range | — | 325 µm[4] |
| Sensor element | — | Capacitive sensor element[4] |
| Motion stage | — | Precision motion stage[4] |
| Vertical resolution | — | Roughly nm scale[4] |
| Stage movement | — | 8 inch[4] |
| Serial number | — | 09940111[4] |
| Tool owner | — | Joseph Jacob[4] |
| Access mode | — | Walk-up tool (no reservation needed)[4] |
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