Comparison ledger
KLA D600 and KLA P-20H, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | D600KLA | P-20HKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 2" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | D-series | — |
| Family | KLA D600 | KLA P-20H |
| Specifications | ||
| Instrument type | Stylus surface profiler[1] | — |
| Measurement purpose | Thin and thick film step height measurement[1] | — |
| Wafer compatibility | 2", 4", 6", and 8" wafers[1] | — |
| Field of view | 3780 x 3120 um[1] | — |
| Digital zoom | x4[1] | — |
| Scan length range | 55 mm with stitching option[1] | — |
| Vertical range | 1 mm[1] | 325 µm[2] |
| Step-height repeatability | 5A[1] | — |
| Force range | 0.03 to 15 mg[1] | — |
| Tool type | — | Stylus profilometer[2] |
| Stylus tip radius | — | 2 µm[2] |
| Stylus cone angle | — | 60°[2] |
| Sensor element | — | Capacitive sensor element[2] |
| Motion stage | — | Precision motion stage[2] |
| Vertical resolution | — | Roughly nm scale[2] |
| Stage movement | — | 8 inch[2] |
| Serial number | — | 09940111[2] |
| Tool owner | — | Joseph Jacob[2] |
| Access mode | — | Walk-up tool (no reservation needed)[2] |
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