KLA
D600
The KLA Tencor D600 is a stylus surface profiler designed for advanced thin and thick film step height measurement. The D600 is compatible with 2", 4", 6", and 8" wafers. The D600 achieves a step-height repeatability of 5 angstroms.[1]
Plate 01Tencor D-600 Thin Film profiler
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Wafer size
2"
Performance
5A[1]
What it is
General reference — not yet source-verifiedStylus profilers are contact metrology tools used to trace surface topography and quantify height differences across patterned or coated substrates. Stylus profilers are commonly used when a process engineer needs direct physical measurement of a surface step, surface texture, or film-related topography.
How it works
The KLA D600 has a field of view of 3780 × 3120 µm with 4× digital zoom. The KLA D600 has a scan length range of 55 mm with a stitching option. The KLA D600 has a vertical range of 1 mm. The KLA D600 has a force range of 0.03 to 15 mg. The KLA D600 has a step-height repeatability of 5 Å.[1]
Where it fits in the process flow
General reference — not yet source-verifiedStylus profilometry is typically used after a film deposition, coating, etch, planarization, or lift-off step when the process has created a measurable height difference. Stylus profilometry is commonly used as an offline metrology step to verify that a preceding process produced the intended topography before later patterning, assembly, or integration steps proceed.
Applications
The KLA D600 is used for advanced thin and thick film step height measurement. The KLA D600 also supports roughness measurement, bow measurement, and stress measurement.[1][3]
- Thin film step height measurement
- Thick film step height measurement
What do the numbers mean?
Wafer handling2
Performance3
Dimensions & facilities4
Configuration & options11
What replaced it?
Related models
- siblingKLA P-17— Listed in the same metrology equipment section.source[1]
- siblingBruker Dektak XT— Listed in the same metrology equipment section.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes are compatible with the KLA D600?
The KLA D600 is compatible with 2 inch, 4 inch, 6 inch, and 8 inch wafers.[1]
What is the scan length range of the KLA D600?
The KLA D600 has a scan length range of 55 mm with a stitching option.[1]
What is the vertical range of the KLA D600?
The KLA D600 has a vertical range of 1 mm.[1]
What is the stylus force range of the KLA D600?
The KLA D600 has a force range of 0.03 to 15 mg.[1]
What measurement modes does the KLA D600 support?
The KLA D600 is capable of measuring 2D and 3D step heights. The KLA D600 also supports 2D and 3D stylus measurements of roughness, plus 2D bow and stress measurements.[3]
Not publicly documented
The following facts about the D600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the D600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the D600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the D600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the D600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the D600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]kla.com — kla.comkla.com
Last updated Oct 20, 2026.
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