Comparison ledger
KLA D600 and KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | D600KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 2" | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | D-series | — |
| Family | KLA D600 | KLA Surfscan |
| Specifications | ||
| Instrument type | Stylus surface profiler[1] | — |
| Measurement purpose | Thin and thick film step height measurement[1] | — |
| Wafer compatibility | 2", 4", 6", and 8" wafers[1] | — |
| Field of view | 3780 x 3120 um[1] | — |
| Digital zoom | x4[1] | — |
| Scan length range | 55 mm with stitching option[1] | — |
| Vertical range | 1 mm[1] | — |
| Step-height repeatability | 5A[1] | — |
| Force range | 0.03 to 15 mg[1] | — |
| Phase | — | 208-240 V, Single phase[2] |
| Configuration | — | 50/60 Hz[2] |
| Full Load Amps | — | 24 A[2] |
| Machine Main Breaker Rating | — | 30 A[2] |
| Ampere Rating of Largest Load | — | 12 A[2] |
| Bright Field (DIC) Option, P/N | — | 515990[2] |
| XY Coordination, P/N | — | 0082158-000[2] |
| Bright Field Sizing, P/N | — | 0082158-000[2] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[2] |
| SEC-1, P/N | — | 0021643-000[2] |
| HSMS, P/N | — | 528080[2] |
| PC-NFS Cient, P/N | — | 556025[2] |
| Desktop PC Software Option, P/N | — | 528170[2] |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[2] |
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