Comparison ledger
KLA FLX 2320 and KLA P 16 +, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | FLX 2320KLA | P 16 +KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA FLX 2320 | KLA P 16 + |
| Specifications | ||
| Configuration | Refurbished[1] | 2A, 20in Hg @ 1cfm[2] |
| Dual Wavelength Scanning | 670 nm, 785 nm[1] | — |
| Software Version | 4.4[1] | — |
| Operation Manual | Digital Copy[1] | — |
| Phase | — | 1 Phase[2] |
| Software | — | (OS) version 7.31.05 [Build 5][2] |
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