Comparison ledger
KLA ICOS CI 8 X 50 Lead, SUSS MicroTec MA 8 BA 8 Gen 5 S Compact Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 8 BA 8 Gen 5 S Compact MaskSUSS MicroTec | |
|---|---|---|
| OEM | KLA | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA ICOS | SUSS MicroTec MA 8 Mask |
| Cited variants | — |
|
| Specifications | ||
| Power | 3.4 kW[1] | — |
| Configuration | 15/30 A[1] | For imprint processing[2] |
| Air Pressure | 5.5 bar[1] | — |
| Reg Temp | 30 Deg C[1] | — |
| Issue | Keeps homing itself[1] | — |
| Category | Lithography[3] | — |
| Type | Lead scanner[1] | — |
| Electrical | 15/30 A[1] | — |
| Regulated temperature | 30 Deg C[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Computer | Removed; no PC inside[1] | — |
| Known issue | Doors in the front do not stay up as they should[1] | — |
| Power supply | — | 3x 400V AC + N + PE / 50-60Hz[2] |
| Max fuse rating machine | — | 30amp[2] |
| Max fuse rating facility | — | 40amp[2] |
| Connection cable | — | 5x AWG8 length 16ft / 5m open end, no connector[2] |
| Outer tube diameter | — | 6mm[2] |
| Max length | — | 2m[2] |
| According to purity level ISO 8573-1 | — | 2010, [5:6:4][2] |
| CDA Consumption | — | ca. 1 m3/h (LH350)[2] |
| AIC or main interrupt and breakers | — | 15 kA IEC[2] |
| Tool type | — | Compact Mask Aligner[2] |
| Use | — | For imprint processing[2] |
| Vacuum | — | <-80 kPa[2] |
| Clean Dry Air (CDA) | — | 0,5 to 0,8 MPa[2] |
| CDA purity | — | According to purity level ISO 8573-1:2010, [5:6:4][2] |
| Nitrogen (N2) | — | 0,2 to 0,5 MPa[2] |
| Voltage/Frequency | — | 200-240 V, L1/N/PE, or L1/L2/PE, 50/60hz[2] |
| SCCR (Short Circuit Current Rating) of overall equipment | — | 5 kA[2] |
| Apparent power | — | ca. 1,7 kVA max, inc. CIC1200 and 350 W lamp; ca. 1,0 kVA max, Bond Aligner without lamp[2] |
| Power cable | — | KABEL OELFLEX 491P BK 3 G2.5 RU AWM CSA[2] |
| Power cable length | — | 3 m[2] |
| Power plug | — | G146853 European Schuko Plug 16A/250V CEE7/7[2] |
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