Comparison ledger
KLA P-15 and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-15KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-15 | KLA P |
| Specifications | ||
| Sample table | 200 mm sample table with vacuum[1] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[1] | — |
| Maximum sample thickness | 20 mm[1] | — |
| Minimum sample length | 25 mm[1] | — |
| Configuration | — | Refurbished[2] |
| Option | — | Stress, 3D. GEM / SECS[2] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[2] |
| Stylus | — | 2 um / 60D[2] |
| OS | — | Windows XP[2] |
| Software | — | Profiler V 7.35[2] |
| Vertical Range | — | 327 um[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →