Waferpedia

Comparison ledger

P 16 + Profiler versus Stereoscan 440

KLA P 16 + Profiler and KLA Stereoscan 440, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA PKLA Stereoscan 440
Specifications
ConfigurationRefurbished[1]Burned out filament[2]
OptionStress, 3D. GEM / SECS[1]
StageFully Motorized X-Y,Z, Theta, Level Stage[1]
Stylus2 um / 60D[1]
OSWindows XP[1]
SoftwareProfiler V 7.35[1]
Vertical Range327 um[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing