Stereoscan 440

The KLA Stereoscan 440 is a scanning electron microscope. The KLA Stereoscan 440 is categorized under metrology and inspection.^[1]

Scanning electron microscopes direct an electron beam onto a specimen in a controlled chamber and collect emitted or reflected signals to build an image line by line. Scanning electron microscopes rely on electron-optical elements, signal detectors, and stage motion to inspect localized features on prepared samples.

In semiconductor work, a scanning electron microscope fits into failure analysis, process characterization, defect review, and engineering inspection rather than direct material deposition or pattern transfer. A scanning electron microscope is typically used after a wafer or sample has undergone one or more fabrication steps and before process changes, disposition decisions, or deeper analytical work.

Scanning electron microscopes are used to examine surface topography, defect morphology, pattern integrity, fracture features, and contamination signatures on semiconductor-related samples. Scanning electron microscopes are also used on cross sections and other prepared specimens when engineers need visual evidence to support troubleshooting or process development.