Comparison ledger
KLA P 16 + and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P 16 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P 16 + | KLA P |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 2A, 20in Hg @ 1cfm[1] | Refurbished[2] |
| Software | (OS) version 7.31.05 [Build 5][1] | Profiler V 7.35[2] |
| Option | — | Stress, 3D. GEM / SECS[2] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[2] |
| Stylus | — | 2 um / 60D[2] |
| OS | — | Windows XP[2] |
| Vertical Range | — | 327 um[2] |
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