Comparison ledger
KLA P 16 +, KLA P 22 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 16 +KLA | P 22 SurfaceKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P 16 + | KLA P |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 2A, 20in Hg @ 1cfm[1] | UPI Board Only[3] |
| Software | (OS) version 7.31.05 [Build 5][1] | — |
| Tool type | Stylus profilometer[2] | — |
| Measurement type | Step height, roughness, waviness, stress[2] | — |
| Vertical range | 327 µm[2] | — |
| Wafer sizes | 2, 3, 4, 5, 6, 8, 12 inch[2] | — |
| Stage | Fully motorized X-Y, Z, theta, and level stage[2] | — |
| Stylus | 2 µm / 60D[2] | — |
| Operating system | Windows XP[2] | — |
| Applications | CMP monitoring and bump metrology[2] | — |
| Manufacturer | — | KLA[3] |
| Model | — | P 22 Surface[4] |
| Equipment type | — | surface profilometer[3] |
| Category | — | Metrology & Inspection[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →