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Comparison ledger

P 16 + versus Surfscan AIT 8010 Particle Defect

KLA P 16 + and KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P 16 +KLA
Surfscan AIT 8010 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P 16 +KLA Surfscan
Specifications
Phase1 Phase[1]1[2]
Configuration2A, 20in Hg @ 1cfm[1]Hz 50-60[2]
Software(OS) version 7.31.05 [Build 5][1]—
Software version—3.3.2.813[2]
CIM—SECS, GEM[2]
Volts—200-240[2]
Amps—30[2]
P 16 + entrySurfscan AIT 8010 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing