Comparison ledger
KLA P-20H and KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-20H | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| Tool type | Stylus profilometer[3] | — |
| Stylus tip radius | 2 µm[3] | — |
| Stylus cone angle | 60°[3] | — |
| Vertical range | 325 µm[3] | — |
| Sensor element | Capacitive sensor element[3] | — |
| Motion stage | Precision motion stage[3] | — |
| Vertical resolution | Roughly nm scale[3] | — |
| Stage movement | 8 inch[3] | — |
| Serial number | 09940111[3] | — |
| Tool owner | Joseph Jacob[3] | — |
| Access mode | Walk-up tool (no reservation needed)[3] | — |
| Configuration | — | 300mm FOUP handler[1] |
| Retested the CPU at bench test | — | CPU boots up with display but mouse and keyboard not working[1] |
| 75mW Laser | — | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] |
| Need replacement of Bright Field laser | — | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] |
| 2 loadports | — | 1 not functioning[4] |
| Largest Load | — | 26 A (Laser)[4] |
| Input Current | — | 30 A, 3 Phase, 50/60 Hz[4] |
| Phase | — | 3 Phase[2] |
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