Comparison ledger
KLA P-20H and KLA Viper 2401 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-20H | KLA Viper |
| Specifications | ||
| Tool type | Stylus profilometer[1] | — |
| Stylus tip radius | 2 µm[1] | — |
| Stylus cone angle | 60°[1] | — |
| Vertical range | 325 µm[1] | — |
| Sensor element | Capacitive sensor element[1] | — |
| Motion stage | Precision motion stage[1] | — |
| Vertical resolution | Roughly nm scale[1] | — |
| Stage movement | 8 inch[1] | — |
| Serial number | 09940111[1] | — |
| Tool owner | Joseph Jacob[1] | — |
| Access mode | Walk-up tool (no reservation needed)[1] | — |
| Phase | — | 1 Phase[2] |
| Configuration | — | 50/60 Hz[2] |
| Supply Voltage | — | 100-200, 200-240 V[2] |
| Interrupt Capacity | — | 10,000 Amps[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →