Comparison ledger
KLA Surfscan SP 1 Classic Particle Defect, KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | KLA Surfscan |
| Cited variants |
|
|
| Specifications | ||
| Configuration | 4 stations[3] | 50/60 Hz[5] |
| Manufacturer | KLA[3] | — |
| Model | Surfscan SP 1 Classic[3] | Surfscan SP 1 TBI[6] |
| Wafer sizes | 6, 8 inch[3] | 12 inch[6] |
| Tool type | particle defect inspection system[4] | — |
| OEM | KLA[3] | — |
| Phase | — | 208-240 V, Single phase[5] |
| Full Load Amps | — | 24 A[5] |
| Machine Main Breaker Rating | — | 30 A[5] |
| Ampere Rating of Largest Load | — | 12 A[5] |
| Bright Field (DIC) Option, P/N | — | 515990[5] |
| XY Coordination, P/N | — | 0082158-000[5] |
| Bright Field Sizing, P/N | — | 0082158-000[5] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[5] |
| SEC-1, P/N | — | 0021643-000[5] |
| HSMS, P/N | — | 528080[5] |
| PC-NFS Cient, P/N | — | 556025[5] |
| Desktop PC Software Option, P/N | — | 528170[5] |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[5] |
| Make | — | KLA[6] |
| Inspection type | — | Unpatterned wafer inspection system[2] |
| Illumination | — | Normal and oblique illumination with brightfield capabilities[2] |
| Triple Beam Illumination | — | TBI[2] |
| Inspection capability | — | Designed to meet the challenging inspection requirements of sub-0.18 micron devices[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →