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Comparison ledger

120 ContinuousversusLSP 6

Lapmaster 120 Continuous, Lapmaster LSP 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
LSP 6Lapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousLapmaster LSP 6
Specifications
Phase—3 Phase[1]
Frequency—60 Hz[2]
Voltage—230V[2]
Type—grinder/polisher[2]
Process type—4-way, planetary, dual face lapping and polishing machine[3]
Electrical service—230 Volts, 60 Hz, 3 Ph.[3]
Power & electrical—3 Phase[2]
Standard feature—programmable process controller[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org