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Comparison ledger

15 Lapperversus6 DA

Lapmaster 15 Lapper, Strasbaugh 6 DA, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
15 LapperLapmaster
6 DAStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 15Strasbaugh 6 DA
Cited variants—
Specifications
Number Of Conditioning RingsUp to 3[3]—
Ring IDUp to 5.5″[3]—
Plate Diameter – Outside15″[3]—
Plate Diameter – Inside3 1/2″[3]—
Standard RPM60[3]—
Drive Motor1/2 HP[3]—
Electrics110V / 1Ph / 60Hz[3]—
Dimensions – Approximate26″(L-R) x 21″(F-B) x 22″(H)[3]—
ConfigurationEquipped with:[3]four spindle[4]
Equipped with: 15″ Cast Iron PlateIncluded[3]—
Equipped with: (3) Yoke/Roller Bearing AssembliesIncluded[3]—
Equipped with: (3) Conditioning RingsIncluded[3]—
Equipped with: (3) Hold DownsIncluded[3]—
Equipped with: 30 Minute TimerIncluded[3]—
Phase—1 phase[4]
Frequency—60 Hz[5]
manufacturer—Strasbaugh[4]
model—6 DA[4]
equipment type—Grinder / Polisher[4]
spindles—four spindle[4]
size—18"[4]
voltage—220 volts[5]
category—CMP[5]
Type—Polisher[2]
Stations—2[2]
Power—220V single-phase, 18 amp[2]
Format—18 inch[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com