Comparison ledger
Leica , Vistec INS 3000, Nordson Stratosphere Plasma Treatment, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | |
|---|---|---|
| OEM | Leica | Nordson |
| Category | — | — |
| Wafer size | 200mm | Wafer kit sensor |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Leica , Vistec INS 3000 | Nordson Stratosphere Plasma Treatment |
| Specifications | ||
| Wafer size | Single 150/200 mm wafer loadport[1] | Wafer kit sensor[2] |
| Type | Optical defect review station[1] | — |
| Wafer loadport | Single 150/200 mm wafer loadport[1] | — |
| Lighting | Bright field light source; DIC DUV light source[1] | — |
| Camera | UV and DUV camera[1] | — |
| Optics | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[1] | — |
| Software | Viscon Software[1] | — |
| Data interface | KLARF input[1] | — |
| Configuration | — | E-FEM, 300mm FOUP (2), ESD[2] |
| Manufacturer | — | Nordson[2] |
| Model | — | Stratosphere[2] |
| Tool family | — | Nordson Stratosphere Plasma Treatment[3] |
| Equipment type | — | Plasma Treatment System[2] |
| Process type | — | Parallel plate asher[2] |
| RF power range | — | 600 to 1000 W[2] |
| Chiller | — | Assy, Chiller, 1HP, 230V/60, 1/4"[2] |
| Vacuum | — | 16 CFM standard dry pump[2] |
| Gas delivery | — | 100 sccm MFC[2] |
| Wafer handling | — | Wafer kit sensor[4] |
| Wafer size kit | — | Wafer kit, 200/300mm hybrid[2] |
| Electrode water cooling | — | Included[2] |
| Electrode temperature sensor | — | F 3 electrode temperature sensor[2] |