Nordson
Stratosphere Plasma Treatment
Wafer size
Wafer kit sensor
Power
Assy, Chiller, 1HP, 230V/60, 1/4"[1]
Vacuum
16 CFM standard dry pump[1]
Gas delivery
100 sccm MFC[1]
What is it?
What do the numbers mean?
Power & electrical3
Vacuum & pumping1
- 16 CFM standard dry pump[1]
Wafer handling2
Gas & chemistry1
- 100 sccm MFC[1]
Configuration & options9
- E-FEM, 300mm FOUP (2), ESD[1]
- Chamber base[1]
- Tuning network[1]
- E-FEM safety cover[1]
- Integration Kit, Plasma Module (1)[1]
- Non-PCR Lit[1]
- Heated capacitance manometer[1]
- Electrode water cooling[1]
- F 3 electrode temperature sensor[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Stratosphere Plasma Treatment are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Stratosphere Plasma Treatment are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Stratosphere Plasma Treatment are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Stratosphere Plasma Treatment are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Stratosphere Plasma Treatment are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Stratosphere Plasma Treatment is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]inventory listing
Last updated Jul 29, 2026.
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