Comparison ledger
Leica , Vistec INS 3000, Ontrak DSS 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | DSS 200Ontrak |
|---|---|---|
| OEM | Leica | Ontrak |
| Category | — | — |
| Wafer size | 200mm | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Leica , Vistec INS 3000 | Ontrak DSS 200 |
| Cited variants | — | |
| Specifications | ||
| Wafer size | Single 150/200 mm wafer loadport[3] | 8" Silicon Wafer Processing[5] |
| Type | Optical defect review station[3] | — |
| Wafer loadport | Single 150/200 mm wafer loadport[3] | — |
| Lighting | Bright field light source; DIC DUV light source[3] | — |
| Camera | UV and DUV camera[3] | — |
| Optics | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[3] | — |
| Software | Viscon Software[3] | — |
| Data interface | KLARF input[3] | — |
| Configuration | — | Series I[4] |
| Phase | — | Wafer Spin Washer/Dryer - 120 VAC - Single Phase - 60 Hz - 15 A[5] |
| Frequency | — | 60 Hz[4] |
| Voltage | — | 120 Vac[4] |
| Vintage | — | 1996[4] |
| Make | — | Ontrak[4] |
| Model | — | DSS 200[4] |
| Power Phase | — | 1 Phase[4] |
| AC Voltage | — | 120 Vac[4] |
| Wafer sizes | — | 8 inch[6] |
| Power | — | 1 phase, 60 Hz, 120 Vac[4] |
| Tool type | — | wafer scrubber[7] |