DSS 200

The Ontrak DSS 200 Series 1 uses an in-line single-wafer processing platform. The Ontrak DSS 200 Series 1 is configured with a wet spray load station, two dual-sided brush modules, a spin rinse dry module, and an unload handler assembly. The Ontrak DSS 200 Series 1 sprays DI water onto the top and bottom wafer surfaces as the wafer passes through each process module. The Ontrak DSS 200 Series 1 uses constant process-water flow to flush the brushes during process and idle modes. The Ontrak DSS 200 Series 1 spins, rinses, and dries wafers in the spin station module.^[9]

The Ontrak DSS 200 Series 1 standard features include a universal load station, double sided PVA scrub, dual brush boxes, ammonia dispense, an IR assisted spin dry station, robotic unload, a vertical unload station, and touchscreen controls. The Ontrak DSS 200 Series 2 standard features include a 200 mm ergonomic load station, double sided PVA scrub, dual brush boxes, dark plastic covers for light sensitive wafers, ammonia dispense, an IR assisted spin dry station, robotic unload, a vertical unload station, and touchscreen controls. The Ontrak DSS 200 Series 2 optional features include megasonics at the spin dry station, a multiple chemical delivery system, and a signal light tower.^{[7][8][10][9]}