Comparison ledger
Leica , Vistec INS 3000, Thermo Fisher Scientific FEI NanoLab 1200 AT FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | Scientific FEI NanoLab 1200 AT FIBThermo Fisher |
|---|---|---|
| OEM | Leica | Thermo Fisher |
| Category | — | — |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Leica , Vistec INS 3000 | Thermo Fisher Scientific FEI NanoLab 1200 AT FIB |
| Specifications | ||
| Wafer size | Single 150/200 mm wafer loadport[1] | High-throughput wafer carrier Kit, (200 mm - 300 mm)[2] |
| Type | Optical defect review station[1] | — |
| Wafer loadport | Single 150/200 mm wafer loadport[1] | — |
| Lighting | Bright field light source; DIC DUV light source[1] | — |
| Camera | UV and DUV camera[1] | — |
| Optics | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[1] | (2) X-Max Detectors, 80 mm HASKRIS Chiller[3] |
| Software | Viscon Software[1] | — |
| Data interface | KLARF input[1] | — |
| Configuration | — | IXL120 Pump[2] |
| Modes | — | SE, BSE[2] |
| Vacuum | — | IXL120 Pump[3] |
| Power | — | S2 Compliant, 60 Hz[3] |
| Gas delivery | — | Carbon deposition precursor[3] |
| Wafer handling | — | High-throughput wafer carrier Kit, (200 mm - 300 mm)[2] |
| (2) 16 | — | 10 LCD Monitors, 24"[2] |
| Operating system | — | Windows XP Manuals[2] |