Thermo Fisher
Scientific FEI NanoLab 1200 AT FIB
Wafer size
200mm
Power
S2 Compliant, 60 Hz[1]
Vacuum
IXL120 Pump[1]
Gas delivery
Carbon deposition precursor[1]
Optics
(2) X-Max Detectors, 80 mm HASKRIS Chiller[1]
What is it?
What do the numbers mean?
Power & electrical1
- S2 Compliant, 60 Hz[1]
Vacuum & pumping1
- IXL120 Pump[1]
Wafer handling2
Gas & chemistry2
Optics & imaging6
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Scientific FEI NanoLab 1200 AT FIB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI NanoLab 1200 AT FIB are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI NanoLab 1200 AT FIB are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI NanoLab 1200 AT FIB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI NanoLab 1200 AT FIB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI NanoLab 1200 AT FIB is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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