Logitech
PM5 alternatives
Comparable CMP equipment documented in the Waferpedia catalog.
6 comparable tools
Logitech
EP1
100mm
CMP
EP1 is a Logitech chemical mechanical polishing cloth and pad product suitable for a wide range of applications, including oxide, nitride, and copper.
Logitech
1 DP 41
CMP
The Logitech 1 DP 41 is a polisher with 3-phase, 50/60 Hz, 480 V, 12 amp electrical requirements.
PR Hoffman
108T
up to 12 in wafers
CMP
Lapmaster
12 Benchtop Lapping Polishing
CMP
Lapmaster
12 Lapper
CMP
Lapmaster
120 Continuous
CMP
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