Logitech

PM5

Research Quality: 60% complete

The Logitech PM5 is a precision lapping and polishing system. The PM5 is a single-workstation machine for small-scale production and research. The PM5 supports wafer sizes up to 4 inches (100mm).^[1]^[2]

PM5 — nanolab.ucla.edu — Fig. 01PM5nanolab.ucla.edu^[3]

Plate 01Logitech Ltd PM5 Precision Lapping & Polishing System
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Plate 02Logitech PM5 System
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Plate 03Logitech PM5 Flatness Monitor
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Plate 04Logitech PM5 Vacuum System
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Wafer size

100mm

Power

Single phase AC100V^[2]

Vacuum

Vacuum^[2]

What it is

The Logitech PM5 is a precision lapping and polishing system. The Logitech PM5 is a single-workstation machine for research and small-scale production. The Logitech PM5 supports wafers up to 100 mm or 4 inches in diameter.^[5]

How it works

The Logitech PM5 operates with a rotating lapping or polishing plate mounted on a drive plate. The Logitech PM5 uses a stainless steel plate covered with a polishing cloth for polishing and a cast iron plate for lapping. The Logitech PM5 holds the sample in a PP6 jig by vacuum. The Logitech PM5 delivers slurry or abrasive onto the plate through a peristaltic pump from a chemical tank. The Logitech PM5 uses a roller arm assembly to guide the jig across the plate. The Logitech PM5 has variable plate speed control.^[5]

What can it run?

Process applications and technology nodes documented for this tool.

Polishing
Lapping

What do the numbers mean?

Power & electrical1

Power supply voltage: Single phase AC100V^[2]2 sources

Vacuum & pumping2

Sample holding method: Vacuum^[2]2 sources
Slurry delivery method: Peristaltic pump^[2]2 sources

Wafer handling3

Sample wafer size: 4 inch (100mm) or smaller^[2]
Wafer size: 100 mm (4 inches) or smaller^[2]
Wafer size: 100mm^[5]

Configuration & options13

Manufacturer: Logitech^[1]2 sources
Model: PM5^[1]3 sources
Application: Polishing and lapping^[1]
Abrasive autofeed cylinder compatibility: Abrasive autofeed cylinder for use with a Logitech PM5 or LP50 system^[4]
Machine type: Lapping and polishing system^[2]2 sources
Number of workstations: Single^[5]
Polishing plate material: Stainless steel^[2]2 sources
Lapping plate material: Cast iron^[2]2 sources
Variable plate speed: Yes^[2]2 sources
Roller arm assembly: Yes^[2]
Emergency stop: Yes^[2]2 sources
Abrasive autofeed cylinder compatibility: Compatible^[4]2 sources
Category: CMP^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power supply voltageSingle phase AC100V^[2]
Sample holding methodVacuum^[2]
Slurry delivery methodPeristaltic pump^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum wafer size supported by the Logitech PM5?

The Logitech PM5 supports wafers up to 100 mm or 4 inches in diameter.^[5]

Is the Logitech PM5 a single-workstation or multi-workstation system?

The Logitech PM5 is a single-workstation machine.^[5]

How does the Logitech PM5 hold the sample during processing?

The Logitech PM5 holds the sample in a PP6 jig by vacuum.^[5]

What plate types does the Logitech PM5 use for polishing and lapping?

The Logitech PM5 uses a stainless steel plate covered with a polishing cloth for polishing and a cast iron plate for lapping.^[5]

How is slurry or abrasive delivered on the Logitech PM5?

The Logitech PM5 delivers slurry or abrasive onto the plate through a peristaltic pump from a chemical tank.^[5]

Not publicly documented

The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
[2]manualslib.com — manualslib.commanualslib.com
[3]nanolab.ucla.edunanolab.ucla.edu
[4]web.archive.org — web.archive.orgweb.archive.org
[5]waferpedia.com — waferpedia.comwaferpedia.com
[6]PM5 Lapping Machine Operation Manual | PDF | Electrical Connector | Switch — scribd.comscribd.com

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Last updated Oct 17, 2026.

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