Comparison ledger
MPI PM100, MPI TS150, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PM100MPI | TS150MPI |
|---|---|---|
| OEM | MPI | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6" | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | MPI PM100 | MPI TS150 |
| Specifications | ||
| Equipment | MPI TS150 Probe Station[1] | — |
| Use | Electrical testing on wafers or chips[1] | Electrical testing on wafers or chips[1] |
| Terminal capacity | Maximum of 4 independent terminals + additional chuck grounding[1] | — |
| Wafer compatibility | Up to 6 inch wafers[1] | — |
| Probe positioners | MPI PM100 true X,Y,Z micro-positioners[1] | True X,Y,Z micro-positioners (MPI PM100)[1] |
| Probe tips | Interchangeable tungsten (W) contact tips[1] | Interchangeable tungsten contact tips; two different diameters available[1] |
| Chuck stage | Fine-glide chuck stage on highly stable granite base[1] | Fine-glide chuck stage on highly stable granite base[1] |
| Travel range | 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[1] | — |
| Maximum independent terminals | — | 4 independent terminals plus additional chuck grounding[1] |
| Wafer size compatibility | — | up to 6 inch[1] |
| X-Y travel range | — | 150 mm x 150 mm coarse and 10 mm x 10 mm fine[1] |
| Optics | — | Binocular optics with oculars or microscope view on monitor[1] |
| Illumination | — | Selectable 4 quadrants LED illumination[1] |
| Measurement capability | — | Designed for electrical testing on wafers or chips[1] |
| Maximum terminals | — | 4 independent terminals + additional chuck grounding[1] |
| Chuck compatibility | — | wafer sizes up to 6 inch, chip or part of wafers[1] |
| Stage type | — | Fine-glide chuck stage on highly stable granite base[1] |
| X-Y travel range (coarse) | — | 150mm x 150mm[1] |
| X-Y travel range (fine) | — | 10mm x 10mm[1] |
| Probe micro-positioners | — | MPI PM100 true X,Y,Z micro-positioners with interchangeable tungsten (W) contact tips (two different diameter available)[1] |
| Additional electrical connection | — | to the chuck for conductive substrates[1] |
| DC measurement unit | — | Agilent 4155C Semiconductor Parameter Analyzer with 4x Medium-power SMU, 2xVSU and 2xVMU[1] |
| DC voltage and current capability | — | +/- 40 Volts and +/- 100 mA measurement unit (SMU)[1] |
| DC measurement resolution | — | 10 femtoamp and 0.2 microvolt[1] |
| Switching box configurations | — | 6 configuration options for standard applications such as FET, bipolar transistors, diodes, 2-points and 4-points general measurements[1] |
| DC software | — | Desktop EasyEXPERT software for PC-based GUI instrument control[1] |
| AC measurement unit | — | Zürich Instruments MFIA multi-frequency impedance analyzer[1] |
| AC signal frequency | — | DC to 5 MHz[1] |
| AC signal voltage | — | 0 to 2.1 V RMS[1] |
| DC bias (2 probes) | — | +/- 10 Volts[1] |
| DC bias (4 probes) | — | +/- 3 Volts[1] |
| Impedance range | — | 1 mOhm to 1 TOhm[1] |
| AC test fixture | — | MFITF can be mounted on the MFIA for rapid testing of wire-bonded surface-mounted devices[1] |
| AC software | — | LabOne software for PC-based GUI instrument control[1] |
| Maximum wafer size compatibility | — | up to 6 inch[1] |
| Number of independent terminals | — | maximum 4 plus additional chuck grounding[1] |
| DC voltage range | — | +/-40 Volts[1] |
| DC current range | — | +/-100 mA[1] |
| SMU measurement resolution | — | 10 femtoamp and 0.2 microvolt[1] |
| AC signal frequency range | — | DC to 5 MHz[1] |
| AC signal voltage range | — | 0 to 2.1 V RMS[1] |
| DC bias range (2 probes) | — | +/-10 Volts[1] |
| DC bias range (4 probes) | — | +/-3 Volts[1] |
| Impedance range (AC) | — | 1 mOhm to 1 TOhm[1] |
| Probe micro-positioner model | — | MPI PM100[1] |
| Probe tip material | — | tungsten carbide (W)[1] |
| Type | — | Probe station[1] |
| Maximum wafer size | — | up to 6 inch[1] |
| Independent terminals | — | maximum of 4 independent terminals + additional chuck grounding[1] |
| Probe positioning | — | Three-axis movement of the probe tips with manual micro-manipulators[1] |
| Chuck travel range | — | 150 mm x 150 mm coarse and 10 mm x 10 mm fine X-Y travel range[1] |
| Max independent terminals | — | 4 plus additional chuck grounding[1] |
| DC measurement voltage | — | +/- 40 Volts[1] |
| DC measurement current | — | +/- 100 mA[1] |
| DC measurement resolution (current) | — | 10 femtoamp[1] |
| DC measurement resolution (voltage) | — | 0.2 microvolt[1] |
| AC DC bias (2 probes) | — | +/- 10 Volts[1] |
| AC DC bias (4 probes) | — | +/- 3 Volts[1] |
| Primary use | — | Electrical testing on wafers or chips[1] |
| Supported wafer size | — | Up to 6 inch[1] |
| Supported substrate description | — | Precise analytical probing of substrates and 150 mm wafers[2] |
| Chuck stage travel range | — | 180 x 230 mm[2] |
| Chuck fine-travel range | — | 25 x 25 mm fine micrometer control[2] |
| Probe platen capacity | — | Up to 10 DC or 4 RF MicroPositioners[2] |
| Platen lift positions | — | Contact (0), separation (300 μm), and loading (3 mm)[2] |
| Standard wafer chuck supported DUT size | — | Single DUTs down to 5 x 5 mm or wafers 50 mm through 150 mm[2] |
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