MPI

TS150

Test & Probe 6"MPI TS150 family

Research Quality: 40% complete

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MPITS150

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Plate 01TS150 200 Probe System Overview. (Обзор зондовых станций TS150 и TS200)
TBS MoscowWatch on YouTube

Wafer size

Optics

Selectable 4 quadrants LED illumination^[1]

What is it?

The MPI TS150 Probe Station is used for probing devices on chip or wafer. The source states it is designed for electrical testing on wafers or chips, with up to 4 independent terminals plus additional chuck grounding, and a chuck compatible with wafer sizes up to 6 inch. It uses binocular optics with a digital camera for probe-tip alignment and manual micro-manipulators for probe movement.

What can it run?

Process applications and technology nodes documented for this tool.

Electrical testing on wafers
Electrical testing on chips
DC characterization of microelectronic devices
AC characterization of devices under test
Resistance measurements
Diode measurements
Transistor measurements
2-point measurements
4-point measurements

Why won't it start?

Documented failure modes, common issues, and field considerations.

The source warns of shock hazard during measurement.
The source states probe needles have very sharp tungsten carbide tips and can be damaged by crash or contamination.
The source warns not to use the probes for mechanical testing or machining.

What do the numbers mean?

Power & electrical1

Measurement capability: Designed for electrical testing on wafers or chips^[1]

Wafer handling3

Maximum independent terminals: 4 independent terminals plus additional chuck grounding^[1]
Wafer size compatibility: up to 6 inch^[1]
Chuck stage: Fine-glide chuck stage on highly stable granite base^[1]

Optics & imaging2

Optics: Binocular optics with oculars or microscope view on monitor^[1]
Illumination: Selectable 4 quadrants LED illumination^[1]

Configuration & options3

X-Y travel range: 150 mm x 150 mm coarse and 10 mm x 10 mm fine^[1]
Probe positioners: True X,Y,Z micro-positioners (MPI PM100)^[1]
Probe tips: Interchangeable tungsten contact tips; two different diameters available^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Measurement capabilityDesigned for electrical testing on wafers or chips^[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

MPI TS150 User ManualManualepfl.ch

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the TS150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TS150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TS150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the TS150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TS150 are on record.
Answerable by: an OEM parts catalog or a service engineer