Comparison ledger
Nikon LV100 and Nikon MM40, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LV100Nikon | MM40Nikon |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon LV100 | Nikon MM40 |
| Cited variants | — | |
| Specifications | ||
| Instrument type | Polarized microscope with heating stage[4] | — |
| Listed model | Nikon LV100 POL[4] | — |
| Illuminator | EPI Illuminator with bright and darkfield[4] | — |
| Objectives | 5X, 10X, 20X, 50X, 100X objectives[4] | — |
| Camera head | Color camera head[4] | — |
| Heating stage | Instec HCS 3 heating stage[4] | — |
| Heating stage temperature range | -190 to 400 °C[4] | — |
| equipment name | — | Nikon MM 40[5] |
| equipment type | — | inspection and 2-D metrology microscope[5] |
| section | — | Inspection Microscope without Camera[5] |
| location | — | Z05[5] |
| option | — | Measurement XYZ[5] |
| Type | — | Inspection and 2-D metrology microscope[5] |
| Measurement capabilities | — | XY and Z (Measurement XYZ)[5] |
| Original illuminator power (halogen) | — | 20W[1] |
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