Comparison ledger
Olympus MX51 and Olympus MX80, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MX51Olympus | MX80Olympus |
|---|---|---|
| OEM | Olympus | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Olympus MX51 | Olympus MX80 |
| Specifications | ||
| Type | Fluorescence Microscope[1] | — |
| Optical system | UIS2 (UIS) universal infinity system[2] | — |
| Viewing head | Trinocular erect image head (U-ETR-4)[3] | — |
| Eyepieces | 10x/26.5 mm super widefield[3] | — |
| Reflected light illuminator | Brightfield/Darkfield illuminator with 100W halogen lamphouse (U-LH100L-3)[3] | — |
| Nosepiece | 5-position brightfield/darkfield nosepiece (U-D6BDRE)[3] | — |
| Objectives (standard set) | MPlanFL N BD 5x, LMPlanFL N BD 10x, 20x, 50x[3] | — |
| Stage (manual) | MX-SIC6R2 6x6-inch stage or U-SIC4R2/SIC4L2 4x4-inch stage[2] | — |
| Motorized XY stage | ProScan H105/2OL series with 154x154 mm travel, encoded or non-encoded options[4] | — |
| Wafer size capability | Up to 6 inch (150 mm) with optional wafer chucks (HWC15S for 4" & 6", HWC15V for 150 mm)[4] | — |
| Microscope frame weight | About 11 kg (24.3 lbs); total system weight about 26 kg (57.3 lbs)[2] | — |
| Halogen lamp life | 2000 hours for long-life type 6V30WHAL-L[2] | — |
| Autofocus (optional) | PF850 standalone hardware autofocus[4] | — |
| Standards compliance | CE, FCC Part 15 Class A, SEMI S2-0703, SEMI S8-1103[2] | — |
| Objectives | — | 1.25x, 5x, 10x, 20x, 50x, and 100x[5] |
| Eyepiece | — | 10x binocular eyepiece[5] |
| Camera | — | Optronics MagnaFire camera with capture software[5] |
| Image analysis software | — | ImagePro Plus[5] |
| Dark field imaging | — | Available for 5x through 100x objectives[5] |
| Nomarski imaging | — | Included for 5x through 100x objectives[5] |
| Illumination | — | Top and bottom illumination[5] |
| UV filter | — | For imaging photoresist[5] |
| Output | — | Photo printer[5] |
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