Olympus
MX51
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Olympus MX51 is a universal reflected-light large stage microscope designed for industrial applications including inspection of electronic devices, molds, wafers, metal and plastic parts. The Olympus MX51 supports brightfield, darkfield, differential interference contrast (DIC), simplified polarized light, and infrared observation modes. The Olympus MX51 accepts wafer sizes up to 150 mm (6 inches) via optional motorized stages and wafer chucks.[1][2]
What it is
The Olympus MX51 is a universal reflected-light large stage microscope intended for industrial applications such as inspection of electronic devices, molds, wafers, metal, and plastic parts. The Olympus MX51 features a trinocular viewing head with super widefield 10x eyepieces that provide a 26.5 mm field of view. The Olympus MX51 is equipped with a 5-position brightfield/darkfield nosepiece. The Olympus MX51 uses the proprietary Frontal Control operational system and UIS2 optics. The Olympus MX51 is compact, simple to operate, and has a flexible modular design.[4][1]
How it works
The Olympus MX51 incorporates a Frontal Control operational system that places all controls within easy reach of the operator. The Olympus MX51 uses a reflected light illuminator with a halogen lamp housed in a 100 W lamphouse. The Olympus MX51 has a 5-position nosepiece for objectives. The Olympus MX51 allows adjustment of illumination brightness and control of the field iris diaphragm and aperture iris diaphragm. The Olympus MX51 stage is moved using coaxial coarse and fine adjustment knobs, with a tension adjustment for the coarse knob. The Olympus MX51 supports multiple observation methods including brightfield, darkfield, differential interference contrast, simplified polarized light, and infrared light observation.[1][2]
Where it fits in the process flow
What do the numbers mean?
Power & electrical1
- Wafer size capability
- Up to 6 inch (150 mm) with optional wafer chucks (HWC15S for 4" & 6", HWC15V for 150 mm)[5]
Optics & imaging3
- Reflected light illuminator
- Brightfield/Darkfield illuminator with 100W halogen lamphouse (U-LH100L-3)[4]
Dimensions & facilities1
- Microscope frame weight
- About 11 kg (24.3 lbs); total system weight about 26 kg (57.3 lbs)[2]
Configuration & options9
- Motorized XY stage
- ProScan H105/2OL series with 154x154 mm travel, encoded or non-encoded options[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Wafer size capabilityUp to 6 inch (150 mm) with optional wafer chucks (HWC15S for 4" & 6", HWC15V for 150 mm)[5]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer size that the Olympus MX51 can handle?
The Olympus MX51 can accommodate wafers up to 6 inches in diameter when fitted with appropriate stages and sample holders.[5]
What observation modes are available on the Olympus MX51?
The Olympus MX51 supports reflected light brightfield and darkfield observation, as well as differential interference contrast, simplified polarized light, and infrared light observation.[2]
What is the field number of the eyepieces on the Olympus MX51?
The Olympus MX51 is equipped with super widefield 10x eyepieces that provide a 26.5 mm field of view.[4]
What type of illumination does the Olympus MX51 use?
The Olympus MX51 uses a reflected light illuminator with a halogen 100 W lamphouse.[4]
Not publicly documented
The following facts about the MX51 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX51 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MX51 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MX51 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MX51 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MX51 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Olympus MX51 Microscope | Microscope Service and Sales — microscopy.uk.commicroscopy.uk.com
- [2]metallurgicalmicroscopes.com — metallurgicalmicroscopes.commetallurgicalmicroscopes.com
- [3]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [4]microscopecentral.com — microscopecentral.commicroscopecentral.com
- [5]prior.com — prior.comprior.com
- [6]Tool List - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [7]Tool List - UCSB Nanofab Wiki — wiki.nanofab.ucsb.eduwiki.nanofab.ucsb.edu
Last updated Aug 13, 2026.
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