Comparison ledger
Oxford Instruments 100 Plus Nitride and Oxford Instruments FlexAL, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 100 Plus NitrideOxford Instruments | FlexALOxford Instruments |
|---|---|---|
| OEM | Oxford Instruments | Oxford Instruments |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Oxford Instruments FlexAL |
| Specifications | ||
| Manufacturer | Oxford[1] | — |
| Model | 100 Plus[1] | — |
| Process | Nitride deposition[1] | — |
| Configuration | — | Compatible with TiN, TaN, TiO, TaO, SiN[2] |
| Gases | — | BTBAS, TBTDMT, TDMAT, CF4[2] |
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