Waferpedia

Comparison ledger

100 Plus Nitride versus PlasmaPro NGP 1000

Oxford Instruments 100 Plus Nitride and Oxford Instruments PlasmaPro NGP 1000, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
100 Plus NitrideOxford Instruments
PlasmaPro NGP 1000Oxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer sizeup to 450mm wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments PlasmaPro NGP 1000
Specifications
ManufacturerOxford[1]
Model100 Plus[1]
ProcessNitride deposition[1]
Wafer sizeup to 450mm wafer size[2]
ConfigurationLoad Locked Chamber[2]
Power600W 13.56Mhz HF RF Generator[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing