Oxford Instruments
PlasmaPro NGP 1000
Wafer size
up to 450mm wafer size
Power
600W 13.56Mhz HF RF Generator[1]
Vacuum
Load Lock vacuum pump[1]
Gas delivery
Gas-Shock assisted Chamber Lift Mechanism[1]
What is it?
What do the numbers mean?
Power & electrical3
- Dual Frequency RF with Pulsing for Film Stress Control[1]
Vacuum & pumping2
Wafer handling3
Gas & chemistry2
Control & software3
Configuration & options7
- 490mm Diameter Aluminum Lower Electrode[1]
- Up to 400*C[1]
- Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition)[1]
- Operations Manual and Documentation[1]
- Fully Refurbished to excellent condition[1]
- Chamber disassembled for refurbishment.[1]
- Chamber received full wet clean[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationDual Frequency RF with Pulsing for Film Stress Control[1]
- Power600W 13.56Mhz HF RF Generator[1]
- Power600W 100khz LF RF Generator[1]
- ConfigurationGas-Shock assisted Chamber Lift Mechanism[1]
- ConfigurationAdixen ADS602P Dry Pump for Process Chamber[1]
- ConfigurationLoad Lock vacuum pump[1]
- ConfigurationX20 External Gas Box with up to 12 Gas Lines. Currently Configured for: He, CF4, N2, N20, NH3, SiH4-N2[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the PlasmaPro NGP 1000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PlasmaPro NGP 1000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PlasmaPro NGP 1000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PlasmaPro NGP 1000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PlasmaPro NGP 1000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PlasmaPro NGP 1000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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