Comparison ledger
Oxford Instruments 80 Plus and Oxford Instruments OpAL, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 80 PlusOxford Instruments | OpALOxford Instruments |
|---|---|---|
| OEM | Oxford Instruments | Oxford Instruments |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 80 Plus | Oxford Instruments OpAL |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 50/60 Hz[1] | Single open loop chamber (non-loadlocked)[2] |
| Voltage | 415 vAC[1] | 208V, 3Ph, 60Hz, 25A[2] |
| Heated table | — | 80-300ºC[2] |
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