Comparison ledger
Oxford Instruments Plasmalab 100 ICP 180 RIE, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Plasmalab 100 ICP 180 RIEOxford Instruments | 110Tegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments Plasmalab 100 | Tegal 110 |
| Cited variants | — |
|
| Specifications | ||
| Voltage | 208V, 50/60Hz[2] | — |
| Configuration | With VAT PM-5 Adaptive Pressure Controller[2] | — |
| Manufacturer | Oxford Instruments[2] | — |
| Model | Plasmalab 100 ICP 180[2] | — |
| Tool type | Reactive Ion Etcher[2] | — |
| Category | Etch[3] | — |
| Wafer size | 6 inch[2] | — |
| Power | 208V, 50/60Hz[2] | — |
| Adaptive pressure controller | VAT PM-5[2] | — |
| Turbopump controller | Adixen ACT 1300M[2] | — |
| Vacuum pump | Leybold D65BCS with oil filter and exhaust filter[2] | — |
| Gas delivery | Gas Box[2] | — |
| Control computer | Control Computer (no HDD)[2] | — |
| Monitor | LCD Monitor[2] | — |
| Chiller | Thermo Neslab Chiller[2] | — |
| Computer cart | Computer Cart[2] | — |
| model | — | 110 SE[1] |
| application focus | — | process development applications[1] |
| process capability | — | deep silicon plasma etching[1] |
| capabilities | — | very high aspect ratio trench etch and profile control[1] |
| configuration | — | multiple configurations with minimum technical intervention[1] |
| System type | — | plasma etch system[4] |
| Supported components | — | MEMS and 3D-IC components[1] |
| Control capability | — | very high aspect ratio trench etch and profile control[4] |
| Physical description | — | compact[1] |
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