Comparison ledger
SPTS CPX Pegasus and SPTS uEtch, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | CPX PegasusSPTS | uEtchSPTS |
|---|---|---|
| OEM | SPTS | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SPTS CPX Pegasus | SPTS uEtch |
| Specifications | ||
| Configuration | 2 Chambers[1] | — |
| Frequency | 60Hz[1] | — |
| Source RF Generator | MKS 6.5 kw RF Power Generator[1] | — |
| Platen RF Generator | MKS/ENI ACG 3B 13.56MHz RF Generator[1] | — |
| Rotary Pump | 3 PCS[1] | — |
| Turbo pump | 2 PCS[1] | — |
| DI Water | SMC HRZ-L2-DY chiller[1] | — |
| Silicon oil | SMC HRZL-D chiller[1] | — |
| Process type | — | Vapor-phase, selective, isotropic etch on sacrificial oxide[2] |
| Process chemistry | — | Anhydrous HF and ethanol (C2H5OH) with nitrogen (N2) gas mixture[2] |
| Operating pressure | — | 125 Torr fixed for the standard processes[2] |
| Standard recipes | — | Recipe1, Recipe2, Recipe3, Recipe4, Recipe5[2] |
| Minimum etch rate - Recipe1 | — | 12 nm/min[2] |
| Minimum etch rate - Recipe2 | — | 38 nm/min[2] |
| Minimum etch rate - Recipe3 | — | 125 nm/min[2] |
| Minimum etch rate - Recipe4 | — | 153 nm/min[2] |
| Minimum etch rate - Recipe5 | — | 175 nm/min[2] |
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