SPTS

CPX Pegasus

Etch SPTS CPX Pegasus family

Research Quality: 30% complete

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CPX Pegasus — Inventory photo — Fig. 01CPX PegasusInventory photo^[1]

Power

380 Volts^[1]

Vacuum

Pumping System:^[1]

What is it?

The SPTS / STS CPX Pegasus is an etcher with 8-inch wafer support and a two-chamber configuration.

What do the numbers mean?

Power & electrical5

380 Volts^[1]; 160 Amps^[1]; RF Generator Units:^[1]
Source RF Generator: MKS 6.5 kw RF Power Generator^[1]
Platen RF Generator: MKS/ENI ACG 3B 13.56MHz RF Generator^[1]

Vacuum & pumping4

Pumping System:^[1]
Rotary Pump: 3 PCS^[1]
Turbo pump: 2 PCS^[1]; Pressure System:^[1]

Wafer handling1

Brooks MagnaTran 7 robot^[1]

Accurate?

Configuration & options10

2 Chambers^[1]
Frequency: 60Hz^[1]; The Transport Module’s components:^[1]; Transport Module Chamber^[1]; Cooling and Heating Systems:^[1]; Four heating/cooling systems:^[1]; House Water^[1]
DI Water: SMC HRZ-L2-DY chiller^[1]
Silicon oil: SMC HRZL-D chiller^[1]; Insert Heaters^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration380 Volts^[1]
Configuration160 Amps^[1]
ConfigurationRF Generator Units:^[1]
Source RF GeneratorMKS 6.5 kw RF Power Generator^[1]
Platen RF GeneratorMKS/ENI ACG 3B 13.56MHz RF Generator^[1]
ConfigurationPumping System:^[1]
Rotary Pump3 PCS^[1]
Turbo pump2 PCS^[1]
ConfigurationPressure System:^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CPX Pegasus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CPX Pegasus are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CPX Pegasus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CPX Pegasus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CPX Pegasus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CPX Pegasus is not on record.
Answerable by: an OEM datasheet or a fab qualification report