Comparison ledger
SPTS MACS ICP, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MACS ICPSPTS | 110Tegal |
|---|---|---|
| OEM | SPTS | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SPTS MACS ICP | Tegal 110 |
| Cited variants |
|
|
| Specifications | ||
| Configuration | HR chamber[3] | — |
| Clamp type | standard WTC[3] | — |
| Coil RF power | Advanced Energy RFG3001, 3kw[3] | — |
| Platen RF power | ENI ACG-3B 13.56MHZ, 300w[3] | — |
| Load lock pump | Ebara AAL10[3] | — |
| Chamber pump | Ebara A30W[3] | — |
| Turbo pump | Leybold MAG2000CT[3] | — |
| Turbo Pump Controller | Leybold MAG Drive 2000[3] | — |
| Chiller | ATS/DEX-20ADI[3] | — |
| Manufacturer | SPTS / STS[3] | — |
| Model | MACS ICP[3] | — |
| Category | Etch[4] | — |
| Wafer size | 8 inch[3] | — |
| Chamber | HR chamber[3] | — |
| Wafer capability | 6", 8" capable[3] | — |
| Wafer handling | MACS loader for cassette to cassette operation (2 load stations)[3] | — |
| Vacuum load lock | Carousel vacuum load lock[3] | — |
| Backside cooling | Helium backside cooling (HBC)[3] | — |
| Gases | C4F8 (200 sccm); SF6 (1000 sccm); O2 (200 sccm); Ar (50 sccm)[3] | — |
| Vintage | 2002[3] | — |
| Voltage | 208 Volts / 60 Hz, 40 Amps/phase[1] | — |
| Chamber quantity | 1 chamber[5] | — |
| model | — | 110 SE[2] |
| application focus | — | process development applications[2] |
| process capability | — | deep silicon plasma etching[2] |
| capabilities | — | very high aspect ratio trench etch and profile control[2] |
| configuration | — | multiple configurations with minimum technical intervention[2] |
| System type | — | plasma etch system[6] |
| Supported components | — | MEMS and 3D-IC components[2] |
| Control capability | — | very high aspect ratio trench etch and profile control[6] |
| Physical description | — | compact[2] |
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