SPTS
MACS ICP
What is it?
What do the numbers mean?
Power & electrical3
- RF Generators:[1]
Vacuum & pumping6
Wafer handling1
- MACS loader for cassette to cassette operation (2 load stations)[1]
Gas & chemistry5
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCarousel vacuum load lock[1]
- ConfigurationRF Generators:[1]
- Coil RF powerAdvanced Energy RFG3001, 3kw[1]
- Platen RF powerENI ACG-3B 13.56MHZ, 300w[1]
- ConfigurationGases:[1]
- ConfigurationC4F8 (200 sccm)[1]
- ConfigurationSF6 (1000 sccm)[1]
- ConfigurationO2 (200 sccm)[1]
- ConfigurationAr (50 sccm)[1]
- ConfigurationVacuum System:[1]
- Load lock pumpEbara AAL10[1]
- Chamber pumpEbara A30W[1]
- Turbo pumpLeybold MAG2000CT[1]
- Turbo Pump ControllerLeybold MAG Drive 2000[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MACS ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MACS ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MACS ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MACS ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MACS ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MACS ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.