Comparison ledger
SPTS Sigma and SPTS Sigma FxP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | SigmaSPTS | Sigma FxPSPTS |
|---|---|---|
| OEM | SPTS | SPTS |
| Category | Deposition | Deposition |
| Wafer size | A 1KW lamp for wafer heating | Mk1 3 KW lamp (provide wafer heating) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SPTS Sigma | SPTS Sigma |
| Specifications | ||
| Configuration | Beta System[1] | Includes:[2] |
| Phase | Power Box (415 VAC, 3 Phase)[1] | Power Box (415 VAC, 3 Phase)[2] |
| Station 1 | Vacuum Cassette Handler (VCH)[1] | Vacuum Cassette Handler (VCH)[2] |
| Station 2 | Pre Heat Chambers[1] | Pre Heat Chamber[2] |
| Wafer size | A 1KW lamp for wafer heating[1] | Mk1 3 KW lamp (provide wafer heating)[2] |
| Station 3 | Aluminum Dep Chamber[1] | W Dep Chamber[2] |
| Wafer | — | 8" compatible[2] |
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