SPTS

Sigma

Deposition A 1KW lamp for wafer heating SPTS Sigma family

Research Quality: 30% complete

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Sigma — Inventory photo — Fig. 01SigmaInventory photo^[1]

Wafer size

A 1KW lamp for wafer heating

Power

Power Box (415 VAC, 3 Phase)^[1]

Vacuum

Cryo Compressors^[1]

What is it?

The SPTS / STS Sigma is a PVD system configured for 6-inch wafers and includes multiple process stations, including pre-heat, aluminum deposition, titanium/titanium nitride deposition, and soft sputter etch.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Computer system does not boot up

What do the numbers mean?

Power & electrical3

Phase: Power Box (415 VAC, 3 Phase)^[1]; PSU Power Supplies^[1]; MDX II Advanced Energy 15 KW DC power supply^[1]

Vacuum & pumping3

Cryo Compressors^[1]
Station 1: Vacuum Cassette Handler (VCH)^[1]; Pfeiffer TPH 062 turbo pump & TCP121 controller^[1]

Wafer handling2

Cassette 1^[1]
Wafer size: A 1KW lamp for wafer heating^[1]

Control & software2

Control Racks^[1]

Accurate?

Shut-idle-vent recipe temp of 150C^[1]

Accurate?

Configuration & options10

Beta System^[1]; Includes:^[1]; Electronic Rack^[1]; Interconnect Cables^[1]; System Heat Exchanger^[1]; Chambers:^[1]
Station 2: Pre Heat Chambers^[1]
Station 3: Aluminum Dep Chamber^[1]; Aluminium target - Al/0.5% Cu^[1]; Standard speed magnetron drive assembly fitted.^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

PhasePower Box (415 VAC, 3 Phase)^[1]
ConfigurationPSU Power Supplies^[1]
ConfigurationCryo Compressors^[1]
Station 1Vacuum Cassette Handler (VCH)^[1]
ConfigurationPfeiffer TPH 062 turbo pump & TCP121 controller^[1]
ConfigurationMDX II Advanced Energy 15 KW DC power supply^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Sigma are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sigma are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sigma are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Sigma is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Sigma are on record.
Answerable by: an OEM parts catalog or a service engineer