Waferpedia

SPTS

Sigma

DepositionA 1KW lamp for wafer heatingSPTS Sigma family
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The SPTS Sigma is a PVD system. The SPTS Sigma is configured for 6-inch wafers. The SPTS Sigma includes a 1KW lamp for wafer heating.[1][2]

Sigma — Inventory photo
Fig. 01SigmaInventory photo[1]

Wafer size

A 1KW lamp for wafer heating

Power

Power Box (415 VAC, 3 Phase)[1]

Vacuum

Cryo Compressors[1]

What it is

The SPTS Sigma is a deposition platform in the Sigma product range. The Sigma product range supports wafer sizes from 100 mm to 300 mm. The Sigma product range covers deposition technologies from conventional PVD through MOCVD.[4]

How it works

The Sigma product range includes Standard PVD for conventional sputter modules for low topography features, Advanced Hi-Fill PVD for ionized sputter source deposition into high aspect ratio features, and C3M for virtually conformal metal coverage using MOCVD technology for advanced liner and barrier films.[4]

Where it fits in the process flow

The Sigma product range serves MEMS, advanced packaging, power semiconductors, photonics, and RF-IC.[4]

Applications

The Sigma product range is used for conventional PVD on low topography features, advanced Hi-Fill PVD on high aspect ratio features, and MOCVD-based metal coverage for advanced liner and barrier films.[4]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Computer system does not boot up

What do the numbers mean?

Power & electrical8

Phase
Power Box (415 VAC, 3 Phase)[1]
Accurate?
PSU Power Supplies[1]
Accurate?
MDX II Advanced Energy 15 KW DC power supply[1]
Accurate?
Power box
415 VAC, 3 Phase[1]
Accurate?
Station 4 RF generator
Advanced energy RFX-600 13.56 MHz RF generator[1]
Accurate?
Station 5 RF generator
Advanced energy RFX-600 A 13.56 MHz RF generator[1]
Accurate?
Station 5 RF generator
Advanced energy RFX-600 13.56 MHz RF generator[1]
Accurate?
Power
Power Box (415 VAC, 3 Phase)[2]
Accurate?

Vacuum & pumping6

Cryo Compressors[1]
Accurate?
Station 1
Vacuum Cassette Handler (VCH)[1]
Accurate?
Pfeiffer TPH 062 turbo pump & TCP121 controller[1]
Accurate?
Base pressure
7E-8 Torr[1]
Accurate?
Station 6
Vacuum Cassette Handler (VCH)[1]
Accurate?
Vacuum
Cryo Compressors[2]
Accurate?

Wafer handling6

Cassette 1[1]
Accurate?
Wafer size
A 1KW lamp for wafer heating[1]
Accurate?
Wafer size
6 inch[1]
Accurate?
Wafer heating
A 1KW lamp for wafer heating[1]
Accurate?
Wafer size
Aviza Silicon oil chiller to control wafer temp whist on the pedestal.[1]
Accurate?
Wafer heating
1KW lamp[2]
Accurate?

Control & software2

Control Racks[1]
Accurate?
Shut-idle-vent recipe temp of 150C[1]
Accurate?

Configuration & options25

Beta System[1]
Accurate?
Includes:[1]
Accurate?
Electronic Rack[1]
Accurate?
Interconnect Cables[1]
Accurate?
System Heat Exchanger[1]
Accurate?
Chambers:[1]
Accurate?
Station 2
Pre Heat Chambers[1]
Accurate?
Station 3
Aluminum Dep Chamber[1]
Accurate?
Aluminium target - Al/0.5% Cu[1]
Accurate?
Standard speed magnetron drive assembly fitted.[1]
Accurate?
Model
Sigma[1]
Accurate?
Make
SPTS / STS[1]
Accurate?
Type
PVD (Physical Vapor Deposition)[1]
Accurate?
System configuration
Beta System[1]
Accurate?
Process station 2
Pre Heat Chambers[1]
Accurate?
Process station 3
Aluminum Dep Chamber[1]
Accurate?
Aluminum target
Al/0.5% Cu[1]
Accurate?
Process station 4
Ti/TiN Dep chamber[1]
Accurate?
Titanium target
Ti 4N5[1]
Accurate?
Process station 5
Soft Sputter Etch chamber[1]
Accurate?
Station 4
Ti/TiN Dep chamber[1]
Accurate?
Station 5
Soft Sputter Etch chamber[1]
Accurate?
Station 3 target
Aluminium target - Al/0.5% Cu[1]
Accurate?
Station 4 target
Titanium target - Ti 4N5[1]
Accurate?
Process type
Physical vapor deposition (PVD)[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Sigma fxP——Used for high-volume production and addresses high-quality metal films; the source states it is a PVD system for metallization on SiC wafers up to 200 mm and on Si wafers up to 300 mm.kla.com[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • PhasePower Box (415 VAC, 3 Phase)[1]
  • ConfigurationPSU Power Supplies[1]
  • ConfigurationCryo Compressors[1]
  • Station 1Vacuum Cassette Handler (VCH)[1]
  • ConfigurationPfeiffer TPH 062 turbo pump & TCP121 controller[1]
  • ConfigurationMDX II Advanced Energy 15 KW DC power supply[1]
  • Power box415 VAC, 3 Phase[1]
  • Base pressure7E-8 Torr[1]
  • Station 4 RF generatorAdvanced energy RFX-600 13.56 MHz RF generator[1]
  • Station 5 RF generatorAdvanced energy RFX-600 A 13.56 MHz RF generator[1]
  • Station 6Vacuum Cassette Handler (VCH)[1]
  • Station 5 RF generatorAdvanced energy RFX-600 13.56 MHz RF generator[1]
  • PowerPower Box (415 VAC, 3 Phase)[2]
  • VacuumCryo Compressors[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What wafer sizes does the Sigma product range support?

The Sigma product range supports wafer sizes from 100 mm to 300 mm.[4]

Which markets are served by Sigma deposition systems?

The Sigma product range serves MEMS, advanced packaging, power semiconductors, photonics, and RF-IC.[4]

Not publicly documented

The following facts about the Sigma are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Sigma are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Sigma is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Sigma are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the Sigma are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]kla.com — kla.comkla.com
  4. [4]Metal Deposition | SPTS — spts.com (Dec 4, 2020)web.archive.org
  5. [5]SPTS Sigma® Physical Vapor Deposition System - InstrumentHive — instrumenthive.cominstrumenthive.com
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Last updated Oct 20, 2026.

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