SPTS

Sigma FxP

Deposition Mk1 3 KW lamp (provide wafer heating)SPTS Sigma family

Research Quality: 30% complete

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Sigma FxP — Inventory photo — Fig. 01Sigma FxPInventory photo^[1]

Wafer size

Mk1 3 KW lamp (provide wafer heating)

Power

Power Box (415 VAC, 3 Phase)^[1]

Vacuum

Cryo Compressors^[1]

What is it?

The SPTS / STS Sigma FxP is a PVD system with 6-inch wafer size and 8-inch compatibility.

What do the numbers mean?

Power & electrical4

Phase: Power Box (415 VAC, 3 Phase)^[1]; PSU Power Supplies^[1]
Wafer size: Mk1 3 KW lamp (provide wafer heating)^[1]; MDX II Advanced Energy 15 KW DC power supply^[1]

Vacuum & pumping4

Cryo Compressors^[1]
Station 1: Vacuum Cassette Handler (VCH)^[1]; Pfeiffer TPH 062 turbo pump & TCP121 controller^[1]; Base pressure <5E-7 Tor^[1]

Wafer handling2

Wafer: 8" compatible^[1]; Cassette 1^[1]

Control & software1

Control Racks^[1]

Accurate?

Configuration & options9

Includes:^[1]; Electronics Rack^[1]; Interconnect Cables^[1]; System Heat Exchanger^[1]; Chambers:^[1]
Station 2: Pre Heat Chamber^[1]
Station 3: W Dep Chamber^[1]; Tungsten target – W 5N^[1]; Slow speed magnetron drive assembly^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

PhasePower Box (415 VAC, 3 Phase)^[1]
ConfigurationPSU Power Supplies^[1]
ConfigurationCryo Compressors^[1]
Station 1Vacuum Cassette Handler (VCH)^[1]
ConfigurationPfeiffer TPH 062 turbo pump & TCP121 controller^[1]
ConfigurationBase pressure <5E-7 Tor^[1]
Wafer sizeMk1 3 KW lamp (provide wafer heating)^[1]
ConfigurationMDX II Advanced Energy 15 KW DC power supply^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Sigma FxP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma FxP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sigma FxP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sigma FxP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sigma FxP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sigma FxP is not on record.
Answerable by: an OEM datasheet or a fab qualification report