Comparison ledger
SPTS XeF2, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | XeF2SPTS | 110Tegal |
|---|---|---|
| OEM | SPTS | Tegal |
| Category | Etch | Etch |
| Wafer size | Up to 6-inch wafers | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2013 Acquisition of XACTIX, Inc. · 2013 XACTIX acquisition | — |
| Control system | — | — |
| Generation | — | — |
| Family | SPTS XeF2 | Tegal 110 |
| Cited variants | — |
|
| Specifications | ||
| Etch type | Isotropic etch[2] | — |
| Selectivity | Over 1000:1 between Si/photoresist, Si/SiO2, and Si/SiN[2] | — |
| Gas flow modes | Continuous and pulsed gas flow[2] | — |
| Operating temperature | Room temperature[2] | — |
| Plasma | No plasma[2] | — |
| Substrate size | Up to 6-inch wafers[2] | — |
| Isotropic etch materials | Si, Mo, Ge, W, C[2] | — |
| Gas delivery | Continuous and pulsed gas flow[3] | — |
| model | — | 110 SE[1] |
| application focus | — | process development applications[1] |
| process capability | — | deep silicon plasma etching[1] |
| capabilities | — | very high aspect ratio trench etch and profile control[1] |
| configuration | — | multiple configurations with minimum technical intervention[1] |
| System type | — | plasma etch system[4] |
| Supported components | — | MEMS and 3D-IC components[1] |
| Control capability | — | very high aspect ratio trench etch and profile control[4] |
| Physical description | — | compact[1] |
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