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Comparison ledger

100R16versus6 DA

Strasbaugh 100R16, Strasbaugh 6 DA, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
6 DAStrasbaugh
OEMStrasbaughStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Strasbaugh 6 DA
Cited variants—
Specifications
type1 spindle grinder/polisher[3]—
drive systemDC drive system with 2 motors[3]—
spindle RPM1-180 RPM[3]—
eccentric RPM1-90 RPM[3]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[3]—
capacity16 inches[3]—
spindle size1-8 TPI[3]—
overall dimensions28 inches x 36 inches x 48 inches[3]—
weight500 lbs[3]—
originmade in the USA[3]—
Configuration—four spindle[4]
Phase—1 phase[4]
Frequency—60 Hz[5]
manufacturer—Strasbaugh[4]
model—6 DA[4]
equipment type—Grinder / Polisher[4]
spindles—four spindle[4]
size—18"[4]
voltage—220 volts[5]
category—CMP[5]
Type—Polisher[2]
Stations—2[2]
Power—220V single-phase, 18 amp[2]
Format—18 inch[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]excelltechnology.comexcelltechnology.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com