Comparison ledger
SUSS MicroTec Falcon, SUSS MicroTec Falcon ACS 200 Coater Developer Cluster, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FalconSUSS MicroTec | Falcon ACS 200 Coater Developer ClusterSUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | Resist Processing | — |
| Wafer size | Wafer Backside Rinse | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec Falcon | SUSS MicroTec Falcon |
| Specifications | ||
| Configuration | Polyimid[1] | Developer (4)[2] |
| Cassette Elevators | 2[1] | — |
| Developer Dispensers | 2[1] | — |
| Wafer size | Wafer Backside Rinse[1] | — |
| Number of Hot Plates | 0[1] | — |
| Number of Chill Plates | 0[1] | — |
| Controller Type | Microprocessor Controller[1] | — |
| Power Requirements | 380 V, 50/60 Hz, 3 Phase[1] | — |
| Wafer Sizes | — | 4, 5, 6, 8 inch[3] |
| Configuration (Asset #142142) | — | Developer (4) 2000 Vintage[2] |
| Configuration (Asset #142141) | — | Coater (3) 2000 Vintage[3] |
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