Comparison ledger
Tegal 1511e, Ulvac NE 950 ICP-RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1511eTegal | NE 950 ICP-RIEUlvac |
|---|---|---|
| OEM | Tegal | Ulvac |
| Category | Etch | Etch |
| Wafer size | three- to six-inch wafers | φ2’ φ4’ φ6’ φ8’ Single Wafer Auto Transfer |
| Process node | — | — |
| Introduced | 1984 | — |
| Production run | 1984– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1511e | Ulvac NE 950 |
| Specifications | ||
| tool type | tri-electrode dual-frequency plasma etch system[1] | — |
| wafer size | three- to six-inch wafers[1] | — |
| first sold | 1984[1] | — |
| system characteristic | first vacuum-loadlocked dual-frequency tri-electrode etch system[1] | — |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | Yes[1] | — |
| Configuration | — | Gas Box:[2] |
| Gas 1 Horiba STEC SEC-E40 Ar | — | 100SCCM[2] |
| Gas 2 Horiba STEC SEC-E40 O2 | — | 100SCCM[2] |
| Gas 3 Horiba STEC SEC-E40 CHF3 | — | 100SCCM[2] |
| Cooling Gas | — | MKS 649A 50SCCM[2] |
| Match Box 1 | — | AMV-1000-12.5M-CT[2] |
| Match Box 2 | — | AMV-1000-AV3[2] |
| Valve | — | MKS T3PIA 26696[2] |
| Gauge | — | MKS E28D[2] |
| Process type | — | ICP-RIE (Inductively Coupled Plasma - Reactive Ion Etch)[2] |
| Wafer size | — | 2" to 12" wafers[2] |
| Chuck | — | φ 305mm (φ2’ φ4’ φ6’ φ8’)[2] |
| RF Generator 1 | — | AX-1000 (AD-TEC)[2] |
| RF Generator 2 | — | AX-1000 (AD-TEC)[2] |
| Gas 1 | — | Horiba STEC SEC-E40 Ar: 100SCCM[2] |
| Gas 2 | — | Horiba STEC SEC-E40 O2: 100SCCM[2] |
| Gas 3 | — | Horiba STEC SEC-E40 CHF3: 100SCCM[2] |
| Gas 4 | — | Horiba STEC SEC-E440J BCL3: 200SCCM[2] |
| Gas 5 | — | Horiba STEC SEC-E440J CL2: 200SCCM[2] |
| Gas 6 | — | Horiba STEC SEC-E440J SiCL4: 200SCCM[2] |
| Pressure valve | — | MKS T3PIA 26696[2] |
| Turbo pump | — | Shimadzu E1-D2203MT / TMP-2203LMTG[2] |
| Dry pump | — | Ulvac HR60[2] |
| Slit Valve | — | SMC XGT312-50336-1A[2] |
| Pirani Gauge | — | Pfeiffer Vacuum TPR280[2] |
| Vaucum Gauge | — | Ulvac M-24[2] |
| Temp Control | — | Risshi EXL 1106[2] |
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