Ulvac
NE 950 ICP-RIE
Wafer size
φ2’ φ4’ φ6’ φ8’ Single Wafer Auto Transfer
Power
RF System:[1]
Vacuum
Pressure Control:[1]
Gas delivery
Gas Box:[1]
How it works
The NE 950 employs two AD-TEC AX-1000 RF generators, one for the ICP source and one for the bias. The system includes two matchboxes: an AMV-1000-12.5M-CT and an AMV-1000-AV3. Pressure is regulated by an MKS T3PIA valve and MKS E28D gauge. The vacuum system uses a Shimadzu TMP-2203LMTG turbo pump.[1]
What do the numbers mean?
Power & electrical5
Vacuum & pumping6
Wafer handling4
- Chuck φ 305mm（φ2’ φ4’ φ6’ φ8’）[1]
Gas & chemistry14
Control & software2
- MKS Valve Control[1]
Configuration & options8
- Chamber:[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGas Box:[1]
- Gas 1 Horiba STEC SEC-E40 Ar100SCCM[1]
- Gas 2 Horiba STEC SEC-E40 O2100SCCM[1]
- Gas 3 Horiba STEC SEC-E40 CHF3100SCCM[1]
- ConfigurationGas 4 Horiba STEC SEC-E440J BCL3 200SCCM[1]
- ConfigurationGas 5 Horiba STEC SEC-E440J CL2 200SCCM[1]
- ConfigurationGas 6 Horiba STEC SEC-E440J SiCL4 200SCCM[1]
- Cooling GasMKS 649A 50SCCM[1]
- ConfigurationRF System:[1]
- ConfigurationRF Generator 1： AX-1000 (AD-TEC)[1]
- ConfigurationRF Generator 2： AX-1000 (AD-TEC)[1]
- ConfigurationPressure Control:[1]
- ConfigurationTurbo Pump:[1]
- RF Generator 1AX-1000 (AD-TEC)[1]
- RF Generator 2AX-1000 (AD-TEC)[1]
- Gas 1Horiba STEC SEC-E40 Ar: 100SCCM[1]
- Gas 2Horiba STEC SEC-E40 O2: 100SCCM[1]
- Gas 3Horiba STEC SEC-E40 CHF3: 100SCCM[1]
- Gas 4Horiba STEC SEC-E440J BCL3: 200SCCM[1]
- Gas 5Horiba STEC SEC-E440J CL2: 200SCCM[1]
- Gas 6Horiba STEC SEC-E440J SiCL4: 200SCCM[1]
- Pressure valveMKS T3PIA 26696[1]
- Turbo pumpShimadzu E1-D2203MT / TMP-2203LMTG[1]
- Dry pumpUlvac HR60[1]
- Pirani GaugePfeiffer Vacuum TPR280[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NE 950 ICP-RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NE 950 ICP-RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NE 950 ICP-RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NE 950 ICP-RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NE 950 ICP-RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NE 950 ICP-RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 13, 2026.
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