Comparison ledger
Tegal 1512e, Tegal 90 X, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | 90 XTegal |
|---|---|---|
| OEM | Tegal | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tegal 90 X |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | Plasma Etcher[2] |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | Dry Etch[2] |
| OEM | — | Tegal[2] |
| Model | — | 90 X[2] |
| Process type | — | Dry Etch[2] |
| Related description | — | non-critical etch tool[4] |
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