Waferpedia

Comparison ledger

Viision 80versusViision 80 Ion

Varian Viision 80, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian Viision 80Varian Viision 80
Cited variants—
  • Viision 80 High Current[1]
Specifications
ConfigurationMedium Current[2]5 Wire[3]
Voltage208 V[2]208 V[1]
Phase3 Phase[2]3 Phase[3]
Power45 kW[2]35 kVA[1]
MakeVarian[2]—
ModelViision 80[2]Viision 80[3]
CategoryIon Implantation[2]—
Wafer Sizes8 inch[2]—
Electrical208 V, 3 Phase, 5 Wire[2]—
Vintage2000[2]1997[3]
Electrical phase—3 Phase[3]
Electrical wires—5 Wire[3]
Voltage range—200-230 Vac[4]
Frequency—50/60 Hz[3]
Maximum current—50 A[1]
Full load current—95 Amps[1]
High current—Yes[1]
Wiring—5 Wire[3]
Current—95 Amps[1]
Max Current—50 A[1]
Type—High Current[1]
OEM—Varian[3]
Equipment type—Ion Implanter[3]
Electrical configuration—3 Phase - 5 Wire - 208 Volts - 50/60 Hz[3]
Current class—High Current[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing