Comparison ledger
Zeiss 1540EsB and Zeiss Merlin, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 1540EsBZeiss | MerlinZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss 1540EsB | Zeiss Merlin |
| Specifications | ||
| System type | FIB/SEM system[1] | — |
| Electron column | FESEM electron column[1] | — |
| Imaging resolution | resolution approaching the 2 nm range[1] | — |
| Ion column | Ga ion column[1] | — |
| Milling capability | allows for milling (sputtering) of materials from the sample[1] | — |
| Deposition materials | Pt, W, and SiOx[1] | — |
| Gas Injection System etch gases | XeF2 and H2O[1] | — |
| Detector options | multiple detector options for different imaging modes[1] | — |
| Instrument type | — | Scanning electron microscope (SEM)[2] |
| Column | — | GEMINI II[2] |
| Stage | — | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[2] |
| Loadlock | — | Semi-automatic airlock[2] |
| Control software | — | ZeissSmartSEM[2] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[2] |
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